Dr. Valeriy V. Yashchuk
Staff Scientist at Lawrence Berkeley National Lab
SPIE Involvement:
Senior status | Conference Program Committee | Author
Publications (64)

PROCEEDINGS ARTICLE | January 18, 2018
Proc. SPIE. 10612, Thirteenth International Conference on Correlation Optics
KEYWORDS: Mirrors, X-ray optics, Metrology, Switching, Sensors, Calibration, Error analysis, X-rays, Data acquisition, Deflectometry

PROCEEDINGS ARTICLE | September 7, 2017
Proc. SPIE. 10385, Advances in Metrology for X-Ray and EUV Optics VII
KEYWORDS: Diffraction, Mirrors, Light sources, X-ray optics, Metrology, Nano opto mechanical systems, Calibration, Interferometry, Synchrotron radiation, Light

PROCEEDINGS ARTICLE | September 7, 2017
Proc. SPIE. 10385, Advances in Metrology for X-Ray and EUV Optics VII
KEYWORDS: Microscopes, X-ray optics, Metrology, Calibration, Interferometry, Optical metrology, Optics manufacturing, Data analysis

PROCEEDINGS ARTICLE | September 7, 2017
Proc. SPIE. 10385, Advances in Metrology for X-Ray and EUV Optics VII
KEYWORDS: Diffraction, Prisms, X-ray optics, Metrology, X-ray sources, Interferometry, Optical metrology, Synchrotrons, Free electron lasers, Coherent x-ray sources

PROCEEDINGS ARTICLE | August 23, 2017
Proc. SPIE. 10388, Advances in Computational Methods for X-Ray Optics IV
KEYWORDS: Optical components, Optical design, X-ray optics, Metrology, Statistical analysis, Data modeling, X-rays, Linear filtering, Spatial resolution, Stochastic processes

PROCEEDINGS ARTICLE | March 28, 2017
Proc. SPIE. 10145, Metrology, Inspection, and Process Control for Microlithography XXXI
KEYWORDS: Fabrication, Semiconductors, Diffraction, Metrology, Imaging systems, Spatial frequencies, Silicon, Optical fabrication, Scanning electron microscopy, Transmission electron microscopy, Software development, Contrast transfer function

Showing 5 of 64 publications
Conference Committee Involvement (10)
Advances in Computational Methods for X-Ray Optics IV
9 August 2017 | San Diego, California, United States
Advances in Metrology for X-Ray and EUV Optics VII
6 August 2017 | San Diego, California, United States
Advances in Metrology for X-Ray and EUV Optics VI
29 August 2016 | San Diego, California, United States
Advances in Computational Methods for X-Ray Optics III
19 August 2014 | San Diego, California, United States
Advances in Metrology for X-Ray and EUV Optics V
18 August 2014 | San Diego, California, United States
Showing 5 of 10 published special sections
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