Dr. Valeriy V. Yashchuk
Staff Scientist at Lawrence Berkeley National Lab
SPIE Involvement:
Senior status | Conference Program Committee | Author
Publications (63)

PROCEEDINGS ARTICLE | September 7, 2017
Proc. SPIE. 10385, Advances in Metrology for X-Ray and EUV Optics VII
KEYWORDS: Metrology, X-ray optics, Mirrors, Nano opto mechanical systems, Calibration, Synchrotron radiation, Light sources, Diffraction, Light, Interferometry

PROCEEDINGS ARTICLE | September 7, 2017
Proc. SPIE. 10385, Advances in Metrology for X-Ray and EUV Optics VII
KEYWORDS: X-ray optics, Metrology, Interferometry, Prisms, Optical metrology, Free electron lasers, Diffraction, Synchrotrons, Coherent x-ray sources, X-ray sources

PROCEEDINGS ARTICLE | September 7, 2017
Proc. SPIE. 10385, Advances in Metrology for X-Ray and EUV Optics VII
KEYWORDS: X-ray optics, Interferometry, Metrology, Optical metrology, Calibration, Optics manufacturing, Data analysis, Microscopes

PROCEEDINGS ARTICLE | August 23, 2017
Proc. SPIE. 10388, Advances in Computational Methods for X-Ray Optics IV
KEYWORDS: Metrology, Data modeling, X-rays, X-ray optics, Stochastic processes, Linear filtering, Spatial resolution, Statistical analysis, Optical design, Optical components

PROCEEDINGS ARTICLE | March 28, 2017
Proc. SPIE. 10145, Metrology, Inspection, and Process Control for Microlithography XXXI
KEYWORDS: Metrology, Imaging systems, Contrast transfer function, Software development, Scanning electron microscopy, Semiconductors, Silicon, Diffraction, Spatial frequencies, Transmission electron microscopy, Optical fabrication, Fabrication

PROCEEDINGS ARTICLE | September 8, 2016
Proc. SPIE. 9962, Advances in Metrology for X-Ray and EUV Optics VI
KEYWORDS: Metrology, Mirrors, Surface finishing, Stochastic processes, X-rays, Modulation transfer functions, Point spread functions, Data modeling, Optical transfer functions, Electronic filtering

Showing 5 of 63 publications
Conference Committee Involvement (10)
Advances in Computational Methods for X-Ray Optics IV
9 August 2017 | San Diego, California, United States
Advances in Metrology for X-Ray and EUV Optics VII
6 August 2017 | San Diego, California, United States
Advances in Metrology for X-Ray and EUV Optics VI
29 August 2016 | San Diego, California, United States
Advances in Computational Methods for X-Ray Optics III
19 August 2014 | San Diego, California, United States
Advances in Metrology for X-Ray and EUV Optics V
18 August 2014 | San Diego, California, United States
Showing 5 of 10 published special sections
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