Prof. Valeryi A. Sizyuk
Research Associate Professor at Purdue Univ
SPIE Involvement:
Senior status | Author
Publications (12)

PROCEEDINGS ARTICLE | March 19, 2018
Proc. SPIE. 10583, Extreme Ultraviolet (EUV) Lithography IX
KEYWORDS: Reflectors, Mirrors, Optical design, Reflectivity, Carbon dioxide lasers, Extreme ultraviolet, Optical simulations, Monochromators, Plasma, Diffraction gratings

SPIE Journal Paper | July 1, 2011
JM3 Vol. 10 Issue 03
KEYWORDS: Plasma, Extreme ultraviolet, Gas lasers, Carbon monoxide, Tin, Laser energy, Absorption, Photon transport, Pulsed laser operation, Nd:YAG lasers

PROCEEDINGS ARTICLE | March 29, 2011
Proc. SPIE. 7969, Extreme Ultraviolet (EUV) Lithography II
KEYWORDS: Laser energy, Nd:YAG lasers, Carbon dioxide lasers, Extreme ultraviolet, Extreme ultraviolet lithography, Pulsed laser operation, Photon transport, Plasma, Tin, Absorption

PROCEEDINGS ARTICLE | March 20, 2010
Proc. SPIE. 7636, Extreme Ultraviolet (EUV) Lithography
KEYWORDS: Carbon dioxide, Laser energy, Nd:YAG lasers, Carbon dioxide lasers, Extreme ultraviolet, Extreme ultraviolet lithography, Pulsed laser operation, Plasma, Tin, Absorption

SPIE Journal Paper | October 1, 2009
JM3 Vol. 8 Issue 04
KEYWORDS: Plasma, Extreme ultraviolet, Spherical lenses, Extreme ultraviolet lithography, Performance modeling, Computer simulations, Absorption, Computing systems, Tin, Systems modeling

PROCEEDINGS ARTICLE | March 24, 2009
Proc. SPIE. 7272, Metrology, Inspection, and Process Control for Microlithography XXIII
KEYWORDS: Laser energy, Laser development, Computer simulations, Extreme ultraviolet, Extreme ultraviolet lithography, Spherical lenses, Performance modeling, Plasma, Tin, Absorption

Showing 5 of 12 publications
SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top