Dr. Veeraraghavan Basker
at IBM Corp
SPIE Involvement:
Publications (5)

Proceedings Article | 22 February 2021 Presentation
Proceedings Volume 11611, 116111R (2021) https://doi.org/10.1117/12.2583636
KEYWORDS: Metrology, Line edge roughness, Gallium arsenide, Transistors, Semiconductors, Nondestructive evaluation, Nanotechnology, Manufacturing, Machine learning, Logic

Proceedings Article | 22 February 2021 Presentation
Proceedings Volume 11609, 116090S (2021) https://doi.org/10.1117/12.2583897

Proceedings Article | 25 March 2020 Presentation
Proceedings Volume 11328, 113280B (2020) https://doi.org/10.1117/12.2552159

Proceedings Article | 5 September 2018 Presentation + Paper
Proceedings Volume 10585, 1058510 (2018) https://doi.org/10.1117/12.2297377
KEYWORDS: Scatterometry, Semiconducting wafers, Scanning electron microscopy, Machine learning, Metrology, Data modeling, Scatter measurement, Mathematical modeling, Transmission electron microscopy, Field effect transistors

Proceedings Article | 19 March 2018 Presentation
Gangadhara Muthinti, Nicolas Loubet, Robinhsinkuo Chao, Abraham Arceo De La Pena, Dexin Kong, Juntao Li, Brock Mendoza, Veeraraghavan Basker, Tenko Yamashita, John Gaudiello, Matthew Sendelbach, Aron Cepler, Susan Ng-Emans, Gilad Barak, Wei Ti Lee
Proceedings Volume 10585, 105850Z (2018) https://doi.org/10.1117/12.2297500
KEYWORDS: Metrology, Gallium arsenide, Etching, Silicon, Measurement devices, Geometrical optics, X-ray fluorescence spectroscopy, Semiconductors, Nanolithography

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