Veerle Van Van Driessche
SPIE Involvement:
Publications (19)

Proceedings Article | 9 April 2024 Presentation + Paper
Si Li, Xinlin Lu, Stephen Grannemann, Daniel Sweat, Kelsey Brakensiek, Pengtao Lu, Joyce Lowes, Vandana Krishnamurthy, Veerle Van Driessche, Douglas Guerrero
Proceedings Volume 12957, 1295715 (2024)
KEYWORDS: Polymers, Film thickness, Lithography, Extreme ultraviolet lithography, Semiconducting wafers, Coating, Tin, Silicon, Diffusion

Proceedings Article | 9 April 2024 Poster + Paper
Proceedings Volume 12957, 129571T (2024)
KEYWORDS: Polymers, Extreme ultraviolet lithography, Line width roughness, Lithography, Adhesives, Adhesion, Extreme ultraviolet

Proceedings Article | 1 May 2023 Presentation + Paper
Proceedings Volume 12498, 124980N (2023)
KEYWORDS: Semiconducting wafers, Extreme ultraviolet lithography, Coating, Coating thickness, Silicon, Photoresist materials, Adhesion, Line width roughness, Resistance, Adhesives

Proceedings Article | 25 May 2022 Presentation + Paper
Proceedings Volume 12055, 120550A (2022)
KEYWORDS: Extreme ultraviolet lithography, Adhesives, Polymers, Etching, Plasma etching, Optical lithography, Semiconducting wafers

Proceedings Article | 23 March 2020 Presentation + Paper
Proceedings Volume 11326, 1132615 (2020)
KEYWORDS: Photoresist materials, Extreme ultraviolet lithography, Lithography, Stochastic processes, Line width roughness, Extreme ultraviolet, Optical lithography, Photoresist developing

Showing 5 of 19 publications
  • View contact details

Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top