CONFERENCE PROCEEDINGS
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Venkat Raghavan Subramanian
at AltaLink
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Publications (1)
Proceedings Article | 27 March 2002 Paper
Fabrication of aperiodic gratings on silicon-on-insulator (SOI) rib waveguides using e-beam lithography
Venkat Subramanian, Ray DeCorby, James McMullin, Chris Haugen, Miroslav Belov
Proceedings Volume 4654, (2002) https://doi.org/10.1117/12.463856
KEYWORDS: Waveguides, Silicon, Fiber Bragg gratings, Electron beam lithography, Etching, Scanning electron microscopy, Optical filters, Refractive index, Reactive ion etching, Fabrication
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