Dr. Vibhu Jindal
Director at Applied Materials Inc
SPIE Involvement:
Publications (31)

Proceedings Article | 4 September 2015 Paper
Matt Malloy, Brad Thiel, Benjamin Bunday, Stefan Wurm, Vibhu Jindal, Maseeh Mukhtar, Kathy Quoi, Thomas Kemen, Dirk Zeidler, Anna Lena Eberle, Tomasz Garbowski, Gregor Dellemann, Jan Hendrik Peters
Proceedings Volume 9661, 96610O (2015) https://doi.org/10.1117/12.2196120
KEYWORDS: Inspection, Photomasks, Semiconducting wafers, Defect inspection, Extreme ultraviolet, Imaging systems, Wafer inspection, Optical inspection, Wafer-level optics, Optics manufacturing

SPIE Journal Paper | 15 May 2015 Open Access
JM3, Vol. 14, Issue 02, 023505, (May 2015) https://doi.org/10.1117/12.10.1117/1.JMM.14.2.023505
KEYWORDS: Extreme ultraviolet, Photomasks, Multilayers, Chemical species, Inspection, Computer simulations, Interfaces, Transmission electron microscopy, Modeling and simulation, Waveguides

Proceedings Article | 16 March 2015 Paper
Proceedings Volume 9422, 942219 (2015) https://doi.org/10.1117/12.2086265
KEYWORDS: Extreme ultraviolet, Photomasks, Extreme ultraviolet lithography, Imaging systems, Line width roughness, Scanners, Prototyping, EUV optics, Metrology, Reflectivity

Proceedings Article | 16 March 2015 Paper
Proceedings Volume 9422, 94220Q (2015) https://doi.org/10.1117/12.2175842
KEYWORDS: Photomasks, Extreme ultraviolet, Multilayers, Chemical species, Extreme ultraviolet lithography, Inspection, Monte Carlo methods, Computer simulations, Waveguides, Transmission electron microscopy

Proceedings Article | 17 April 2014 Paper
Proceedings Volume 9048, 90483L (2014) https://doi.org/10.1117/12.2057761
KEYWORDS: Finite-difference time-domain method, Photomasks, Chemical species, Transmission electron microscopy, Multilayers, Extreme ultraviolet lithography, Extreme ultraviolet, Monte Carlo methods, Atomic force microscopy, Inspection

Showing 5 of 31 publications
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