Dr. Vibhu Jindal
Manager at Applied Materials Inc
SPIE Involvement:
Author
Publications (31)

Proceedings Article | 4 September 2015
Proc. SPIE. 9661, 31st European Mask and Lithography Conference
KEYWORDS: Wafer-level optics, Imaging systems, Inspection, Optical inspection, Wafer inspection, Photomasks, Extreme ultraviolet, Semiconducting wafers, Optics manufacturing, Defect inspection

SPIE Journal Paper | 15 May 2015
JM3 Vol. 14 Issue 02
KEYWORDS: Extreme ultraviolet, Photomasks, Multilayers, Chemical species, Inspection, Computer simulations, Interfaces, Transmission electron microscopy, Modeling and simulation, Waveguides

Proceedings Article | 16 March 2015
Proc. SPIE. 9422, Extreme Ultraviolet (EUV) Lithography VI
KEYWORDS: Multilayers, Waveguides, Chemical species, Inspection, Computer simulations, Transmission electron microscopy, Monte Carlo methods, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography

Proceedings Article | 16 March 2015
Proc. SPIE. 9422, Extreme Ultraviolet (EUV) Lithography VI
KEYWORDS: Metrology, Imaging systems, Scanners, Reflectivity, Photomasks, Extreme ultraviolet, Line width roughness, Extreme ultraviolet lithography, Prototyping, EUV optics

Proceedings Article | 17 April 2014
Proc. SPIE. 9048, Extreme Ultraviolet (EUV) Lithography V
KEYWORDS: Lithography, Nanoparticles, Particles, Scanning electron microscopy, Profilometers, Photomasks, Extreme ultraviolet, Compound parabolic concentrators, Extreme ultraviolet lithography, Plasma

Proceedings Article | 17 April 2014
Proc. SPIE. 9048, Extreme Ultraviolet (EUV) Lithography V
KEYWORDS: Multilayers, Finite-difference time-domain method, Chemical species, Inspection, Atomic force microscopy, Transmission electron microscopy, Monte Carlo methods, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography

Showing 5 of 31 publications
SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top