Dr. Victor M. Blanco Carballo
at imec
SPIE Involvement:
Author
Publications (18)

Proceedings Article | 16 October 2019
Proc. SPIE. 11147, International Conference on Extreme Ultraviolet Lithography 2019
KEYWORDS: Polishing, Metrology, Logic, Etching, Copper, Inspection, Extreme ultraviolet, Optical alignment, Overlay metrology, Chemical mechanical planarization

Proceedings Article | 26 September 2019
Proc. SPIE. 11147, International Conference on Extreme Ultraviolet Lithography 2019
KEYWORDS: Diffraction, Phase modulation, Metals, Phase shift keying, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography, Optical proximity correction, Nanoimprint lithography, Semiconducting wafers

Proceedings Article | 26 March 2019
Proc. SPIE. 10957, Extreme Ultraviolet (EUV) Lithography X
KEYWORDS: Lithography, Logic, Optical lithography, Etching, Photoresist materials, Extreme ultraviolet lithography

Proceedings Article | 25 March 2019
Proc. SPIE. 10960, Advances in Patterning Materials and Processes XXXVI
KEYWORDS: Amorphous silicon, Oxides, Optical lithography, Etching, Scanning electron microscopy, Atomic layer deposition, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography

Proceedings Article | 3 October 2018
Proc. SPIE. 10809, International Conference on Extreme Ultraviolet Lithography 2018
KEYWORDS: Reticles, Logic, Scanners, Extreme ultraviolet, Extreme ultraviolet lithography, Source mask optimization, Semiconducting wafers

Showing 5 of 18 publications
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