Victor Huang
Senior Manager at Pall Corp
SPIE Involvement:
Author
Publications (5)

Proceedings Article | 27 March 2014
Proc. SPIE. 9051, Advances in Patterning Materials and Processes XXXI
KEYWORDS: Lithography, Polymers, Silicon, Quantitative analysis, Organic materials, Finite element methods, Photomasks, Photoresist processing, Semiconducting wafers, Defect inspection

Proceedings Article | 19 March 2012
Proc. SPIE. 8325, Advances in Resist Materials and Processing Technology XXIX
KEYWORDS: Scattering, Polymers, Diffusion, Inspection, Printing, Line width roughness, Semiconductor manufacturing, Immersion lithography, Optics manufacturing, Resolution enhancement technologies

Proceedings Article | 4 December 2008
Proc. SPIE. 7140, Lithography Asia 2008
KEYWORDS: Polishing, Scattering, Particles, Crystals, Light scattering, Coating, Inspection, Scanning electron microscopy, Semiconducting wafers, Defect inspection

Proceedings Article | 6 April 2007
Proc. SPIE. 6519, Advances in Resist Materials and Processing Technology XXIV
KEYWORDS: Logic, Capillaries, Image processing, Scanners, Skin, Scanning electron microscopy, Line width roughness, Immersion lithography, Semiconducting wafers, Liquids

Proceedings Article | 20 March 2006
Proc. SPIE. 6154, Optical Microlithography XIX
KEYWORDS: Oxides, Lithography, Antireflective coatings, Optical lithography, Etching, Dielectrics, Interfaces, Reflectivity, Photomasks, Critical dimension metrology

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