Dr. Victor Lifton
at mPhase Technologies Inc
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | April 24, 2003
Proc. SPIE. 5116, Smart Sensors, Actuators, and MEMS
KEYWORDS: Microelectromechanical systems, Oxides, Reflectors, Mirrors, Switches, Optical fabrication equipment, Electrodes, Silicon, Microopto electromechanical systems, Semiconducting wafers

PROCEEDINGS ARTICLE | January 20, 2003
Proc. SPIE. 4983, MOEMS and Miniaturized Systems III
KEYWORDS: Microelectromechanical systems, Actuators, Lithography, Mirrors, Etching, Electrodes, Crystals, Silicon, Adaptive optics, Semiconducting wafers

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