Victor V. Mamaev
at Semiteq JSC
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 30 December 2016
Proc. SPIE. 10224, International Conference on Micro- and Nano-Electronics 2016
KEYWORDS: Resistance, Gallium nitride, Aluminum, Aluminum nitride, Transistors, Plasma etching, Silicon carbide, Metalorganic chemical vapor deposition, Gallium, Heterojunctions

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