Mr. Victor A. Marchenko
at IMTHPM
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | April 29, 2008
Proc. SPIE. 7025, Micro- and Nanoelectronics 2007
KEYWORDS: Oxides, Vanadium, Argon, Chemical species, Sputter deposition, Metals, Ions, Diffusion, Oxygen, Oxidation

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