Dr. Victor M. Martinez
at Motorola Inc
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | July 1, 2003
Proc. SPIE. 5044, Advanced Process Control and Automation
KEYWORDS: Lithography, Metrology, Data modeling, Manufacturing, Control systems, Process control, Adaptive control, Semiconducting wafers, Overlay metrology, Device simulation

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