Victor Monreal
at EMD Performance Materials Corp
SPIE Involvement:
Author
Publications (4)

Proceedings Article | 19 March 2018 Presentation
Proc. SPIE. 10586, Advances in Patterning Materials and Processes XXXV
KEYWORDS: Thin films, Lithography, Polymethylmethacrylate, Annealing, Directed self assembly, High volume manufacturing, Nanolithography, Thin film manufacturing, Resolution enhancement technologies, Temperature metrology

Proceedings Article | 19 March 2012 Paper
Proc. SPIE. 8325, Advances in Resist Materials and Processing Technology XXIX
KEYWORDS: Lithography, Image processing, Particles, Inspection, Photoresist materials, Image quality, Image filtering, Semiconducting wafers, Absorption filters, Absorption

Proceedings Article | 16 April 2011 Paper
Proc. SPIE. 7972, Advances in Resist Materials and Processing Technology XXVIII
KEYWORDS: Particles, Composites, Coating, Inspection, Scanning electron microscopy, Image filtering, Thin film coatings, Photoresist processing, Semiconducting wafers, Defect inspection

Proceedings Article | 11 December 2009 Paper
Proc. SPIE. 7520, Lithography Asia 2009
KEYWORDS: Carbon, Lithography, Etching, Image processing, Silicon, Coating, Fourier transforms, Oxygen, Photoresist materials, Photomasks

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