Vijaya Kumar Mathe
at Royal Melbourne Institute of Technology
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 2 April 2004
Proc. SPIE. 5276, Device and Process Technologies for MEMS, Microelectronics, and Photonics III
KEYWORDS: Thin films, Curium, Crystals, Nickel, Silicon, Semiconductor lasers, Silicon films, Solids, Palladium, Shape memory alloys

Proceedings Article | 13 November 2002
Proc. SPIE. 4936, Nano- and Microtechnology: Materials, Processes, Packaging, and Systems
KEYWORDS: Thin films, Titanium, Contamination, Sputter deposition, Nickel, Silicon, Oxygen, Silicon films, Palladium, Shape memory alloys

Proceedings Article | 13 November 2002
Proc. SPIE. 4936, Nano- and Microtechnology: Materials, Processes, Packaging, and Systems
KEYWORDS: Optical lithography, Crystals, Silicon, Semiconductor lasers, Laser ablation, Silicon films, Solids, Excimer lasers, Micromachining, Shape memory alloys

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