Tunable optical filters are key components for dense wavelength-division-multiplexed (DWDM) optical networks. One of the successful mechanisms to realize the wavelength tunability is by utilizing micro-electromechanical systems (MEMS) technology. The tuning mechanism works by applying a voltage between the top mirror and the bottom electrode. Micromechanically actuated optical filters are desirable because of their wide tuning range and process compatibility with other optoelectronic devices. Modeling and simulation play important roles in the MEMS domain. In this paper, we present four different mirror models. A detailed theoretical analysis including both static and dynamic aspects was developed on the four mirror models. A record tuning range of 149 nm with a very small actuation voltage of 2.5 V is achieved for the MEMS-based tunable optical filter.
In this paper, we will show modeling of MEM-mirrors for tunable optical filters and present the simulation results using ConventorWare software. The gold-plated micro-mirror is placed on InP/Air pair structure separated by air-gap. A voltage induced electrostatic force displaces the micro-mirror. Very wide tuning range of 149 nm is observed for InP/air-gap filters at low actuation voltage of 2.5V. To carry out optical simulation we developed a JAVA program that characterizes the reflectance spectra and the tuning behavior. These mirror designs can be utilized for optical communication and sensing applications in tunable optical filters.