Dr. Vikrant Chauhan
at GLOBALFOUNDRIES Inc
SPIE Involvement:
Author
Publications (8)

Proceedings Article | 20 March 2015 Paper
Proc. SPIE. 9425, Advances in Patterning Materials and Processes XXXII
KEYWORDS: Optical lithography, Etching, Image processing, Photomasks, Double patterning technology, Nanoimprint lithography, Critical dimension metrology, Neodymium, Photoresist processing, Binary data

Proceedings Article | 16 March 2015 Paper
Proc. SPIE. 9422, Extreme Ultraviolet (EUV) Lithography VI
KEYWORDS: Lithography, Metals, Reliability, Reflectivity, Monte Carlo methods, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography, Semiconducting wafers, Personal protective equipment

Proceedings Article | 29 March 2013 Paper
Proc. SPIE. 8682, Advances in Resist Materials and Processing Technology XXX
KEYWORDS: Lithography, Optical lithography, Data modeling, Modulation, Polymers, Image processing, Diffusion, Manufacturing, Critical dimension metrology, Photoresist processing

Proceedings Article | 20 March 2012 Paper
Proc. SPIE. 8325, Advances in Resist Materials and Processing Technology XXIX
KEYWORDS: Roads, Etching, Polymers, Image processing, Scanning electron microscopy, Optical proximity correction, Reactive ion etching, Neodymium, Semiconducting wafers, Photoresist developing

Proceedings Article | 30 January 2012 Paper
Proc. SPIE. 8247, Frontiers in Ultrafast Optics: Biomedical, Scientific, and Industrial Applications XII
KEYWORDS: Ultrafast phenomena, Fabry–Perot interferometers, Polarization, Cameras, Glasses, Polarizers, Gaussian pulse, Deconvolution, Measurement devices, Laser systems engineering

Showing 5 of 8 publications
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