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Viktor Dudash
at imec
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Publications (1)
Proceedings Article | 23 March 2020 Presentation + Paper
Roughness study on line and space patterning with chemo-epitaxy directed self-assembly
Proceedings Volume 11326, 113260X (2020) https://doi.org/10.1117/12.2552354
KEYWORDS: Directed self assembly, Line edge roughness, Annealing, Line width roughness, Temperature metrology, Optical lithography, Etching, Scanning electron microscopy, Materials processing, Picosecond phenomena
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