Dr. Vimal Kamineni
Principal Research Engineer at GLOBALFOUNDRIES Inc
SPIE Involvement:
Author
Publications (10)

SPIE Journal Paper | March 14, 2016
JM3 Vol. 15 Issue 01
KEYWORDS: Directed self assembly, Critical dimension metrology, Scatterometry, Polymethylmethacrylate, Optical components, Picosecond phenomena, Optical simulations, Chemical elements, Optical lithography, Ellipsometry

SPIE Journal Paper | August 3, 2015
JM3 Vol. 14 Issue 03
KEYWORDS: Line edge roughness, Silicon, Scatterometry, Data modeling, Optical components, Scanning electron microscopy, Picosecond phenomena, Chemical elements, Line width roughness, Optical properties

SPIE Journal Paper | April 10, 2015
JM3 Vol. 14 Issue 02
KEYWORDS: Silicon, Picosecond phenomena, Scatterometry, Anisotropy, Semiconducting wafers, Data modeling, Metrology, Optical lithography, Chemical elements, Directed self assembly

PROCEEDINGS ARTICLE | April 10, 2015
Proc. SPIE. 9424, Metrology, Inspection, and Process Control for Microlithography XXIX
KEYWORDS: Optical components, Data modeling, Optical properties, Spatial frequencies, Silicon, Scatterometry, Critical dimension metrology, Line edge roughness, Chemical elements, Inverse optics

SPIE Journal Paper | November 4, 2014
JM3 Vol. 13 Issue 04
KEYWORDS: Silicon, Scattering, X-rays, Hydrogen, Critical dimension metrology, Annealing, Metrology, Scatter measurement, Double patterning technology

PROCEEDINGS ARTICLE | April 2, 2014
Proc. SPIE. 9050, Metrology, Inspection, and Process Control for Microlithography XXVIII
KEYWORDS: Carbon, Edge detection, Metrology, Silicon, Coating, Transmission electron microscopy, Photoresist materials, Scanning transmission electron microscopy, Edge roughness

Showing 5 of 10 publications
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