Mr. Vincent Patoz
Sales Manager at Safran Reosc
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | March 29, 2011
Proc. SPIE. 7969, Extreme Ultraviolet (EUV) Lithography II
KEYWORDS: Cooling systems, Mirrors, Polishing, Scanners, Manufacturing, Reflectivity, Extreme ultraviolet, Extreme ultraviolet lithography, EUV optics, Plasma

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