Dr. Vincent Senez
at Univ of Tokyo
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | March 30, 2004
Proc. SPIE. 5274, Microelectronics: Design, Technology, and Packaging
KEYWORDS: Oxides, Thin films, Calibration, Crystals, Silicon, Raman spectroscopy, Silicon films, Thermal modeling, Temperature metrology, Oxidation

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