Yongsheng Shu
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 5 May 2005
Proc. SPIE. 5756, Design and Process Integration for Microelectronic Manufacturing III
KEYWORDS: Optical proximity correction, Model-based design, Critical dimension metrology, Error analysis, Algorithm development, Visualization, Resolution enhancement technologies, Lithography, Photomasks, Semiconducting wafers

Proceedings Article | 20 March 1997
Proc. SPIE. 2921, International Conference on Experimental Mechanics: Advances and Applications
KEYWORDS: Water, Charge-coupled devices, Reflectors, Glasses, Computing systems, Image processing, Refractive index, CCD image sensors, Motion detection, Motion models

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