Mr. Vinod Venkatesan
at KLA-Tencor New York
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | April 10, 2013
Proc. SPIE. 8681, Metrology, Inspection, and Process Control for Microlithography XXVII
KEYWORDS: Defect detection, Sensors, Etching, Image processing, Inspection, Optical inspection, Bridges, Semiconducting wafers, Front end of line, Defect inspection

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