Dr. Vishal Sipani
at Micron Technology Inc
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | March 26, 2008
Proc. SPIE. 6923, Advances in Resist Materials and Processing Technology XXV
KEYWORDS: Reticles, Optical lithography, Polymers, Molecules, Diffusion, Photoresist materials, Critical dimension metrology, Fluorine, Photoresist processing, Semiconducting wafers

PROCEEDINGS ARTICLE | April 11, 2006
Proc. SPIE. 6153, Advances in Resist Technology and Processing XXIII
KEYWORDS: Oxides, Etching, Polymers, Silicon, Plasmas, Reflectivity, Chemical vapor deposition, Photoresist materials, Silicon carbide, Semiconducting wafers

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