Mr. Vitaly V. Chernik Profile

Vitaly V. Chernik

Researcher at NANOTECH SWHL GmbH

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Author

Publications (8)

Proceedings Article | 23 March 2020 Paper

Experimental verification of sub-wavelength holographic lithigraphy (SWHL) concept

M. Borisov, D. Chelubeev, V. Chernik, L. Merkushov, V. Rakhovskiy, A. Shamaev

Proceedings Volume 11324, 113241J (2020) https://doi.org/10.1117/12.2552013

KEYWORDS: Photomasks, Holography, Photoresist materials, Lithography, Optical lithography, Image resolution, Holograms, 3D image reconstruction, Digital holography

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Proceedings Article | 23 March 2020 Paper

Mathematical problems of holographic mask synthesis

M. Borisov, D. Chelubeev, V. Chernik, L. Merkushov, V. Rakhovskiy, A. Shamaev

Proceedings Volume 11324, 113241I (2020) https://doi.org/10.1117/12.2551942

KEYWORDS: Photomasks, Holography, Holograms, Image quality, Lithography, Diffraction, Algorithm development, Software development, 3D image reconstruction, Phase shifts, Digital holography

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Proceedings Article | 23 March 2020 Presentation + Paper

Sub-wavelength holographic lithography (SWHL)

M. Borisov, D. Chelubeev, V. Chernik, V. Rakhovskiy, A. Shamaev

Proceedings Volume 11324, 1132417 (2020) https://doi.org/10.1117/12.2551936

KEYWORDS: Photomasks, Holography, Lithography, Image quality, Manufacturing, Photoresist materials, 3D image reconstruction, Algorithm development, Holograms, Diffraction

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Proceedings Article | 23 March 2020 Paper

Maskless holographic schemes based on phase micromirror SLMs

M. Borisov, D. Chelubeev, V. Chernik, L. Merkushov, V. Rakhovskiy, A. Shamaev

Proceedings Volume 11324, 113241K (2020) https://doi.org/10.1117/12.2552074

KEYWORDS: Digital holography, Maskless lithography, Spatial light modulators, Photomasks, 3D image reconstruction, Micromirrors, Lithography

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Proceedings Article | 28 September 2017 Paper

Experimental verification of sub-wavelength holographic lithography physical concept for single exposure fabrication of complex structures on planar and nonplanar surfaces

Michael Borisov , Dmitry Chelyubeev, Vitaly Chernik, Peter Miheev, Vadim Rakhovskiі, Alexei Shamaev

Proceedings Volume 10446, 104460X (2017) https://doi.org/10.1117/12.2279736

KEYWORDS: Photomasks, Holography, Lithography, Cameras, Microelectromechanical systems, Helium cadmium lasers, Light sources

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Proceedings Article | 17 April 2012 Paper

Phase-shift at subwavelength holographic lithography (SWHL)

Mikhail Borisov, Dmitriy Chelyubeev, Vitalij Chernik, Alexander Gavrikov, Dmitriy Yu. Knyazkov, Petr Mikheev, Vadim Rakhovsky, Alexey Shamaev

Proceedings Volume 8352, 83520P (2012) https://doi.org/10.1117/12.918016

KEYWORDS: Phase shifts, Photomasks, Holograms, Holography, 3D image reconstruction, Lithography, Manufacturing, Transparency, Photoresist materials, Tolerancing

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Proceedings Article | 6 December 2006 Paper

X-ray polycapillary imaging microscopy

V. Chernik, A. Romanov

Proceedings Volume 5943, 59430J (2006) https://doi.org/10.1117/12.637922

KEYWORDS: X-rays, X-ray imaging, X-ray optics, X-ray microscopy, Image resolution, Optics manufacturing, Visualization, Capillaries, Microscopes, Image processing

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Proceedings Article | 6 December 2006 Paper

Commercial CCD-TV cameras application for research of radiation fields of capillary x-ray optics elements

V. Chernik, P. Lezhnin

Proceedings Volume 5943, 59430L (2006) https://doi.org/10.1117/12.637924

KEYWORDS: X-rays, CCD cameras, X-ray imaging, Cameras, X-ray optics, Imaging systems, Capillaries, Optical components, Photons, Video

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Showing 5 of 8 publications

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