Vitaly V. Chernik
SPIE Involvement:
Author
Publications (4)

Proceedings Article | 28 September 2017
Proc. SPIE. 10446, 33rd European Mask and Lithography Conference
KEYWORDS: Microelectromechanical systems, Lithography, Light sources, Holography, Cameras, Photomasks, Helium cadmium lasers

Proceedings Article | 17 April 2012
Proc. SPIE. 8352, 28th European Mask and Lithography Conference
KEYWORDS: Lithography, Holograms, Holography, Transparency, 3D image reconstruction, Manufacturing, Photoresist materials, Photomasks, Tolerancing, Phase shifts

Proceedings Article | 6 December 2006
Proc. SPIE. 5943, X-ray and Neutron Capillary Optics II
KEYWORDS: Optical components, X-ray optics, Imaging systems, Cameras, Capillaries, Video, Photons, X-rays, CCD cameras, X-ray imaging

Proceedings Article | 6 December 2006
Proc. SPIE. 5943, X-ray and Neutron Capillary Optics II
KEYWORDS: Microscopes, X-ray optics, Visualization, Capillaries, Image processing, X-rays, X-ray microscopy, Image resolution, X-ray imaging, Optics manufacturing

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