Mr. Vitaly O. Kuzmenko Profile

Vitaly O. Kuzmenko

at Valiev Institute of Physics and Technology

SPIE Involvement:

Author

Publications (3)

Proceedings Article | 31 January 2022 Paper

A. Miakonkikh, A. Shishlyannikov, A. Tatarintsev, V. Kuzmenko, K. Rudenko, E. Gornev

Proceedings Volume 12157, 1215717 (2022) https://doi.org/10.1117/12.2626386

KEYWORDS: Etching, Silicon, Plasma, Plasma etching

Proceedings Article | 15 March 2019 Paper

V. Kuzmenko, A. Miakonkikh, K. Rudenko

Proceedings Volume 11022, 1102226 (2019) https://doi.org/10.1117/12.2522473

KEYWORDS: Etching, Aluminum, Focus stacking software, Adsorption, Plasma, Plasma etching, Oxides, Semiconducting wafers, Hafnium, Argon

Proceedings Article | 15 March 2019 Paper

V. Kuzmenko, A. Miakonkikh, K. Rudenko

Proceedings Volume 11022, 1102225 (2019) https://doi.org/10.1117/12.2522472

KEYWORDS: Etching, Plasma, Polymers, Silicon, Semiconducting wafers, Oxides, Polymer thin films, Argon, Focus stacking software, Oxygen

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