Dr. Vito Dai
VP of Engineering
SPIE Involvement:
Author
Publications (24)

Proceedings Article | 22 February 2021 Presentation
Proceedings Volume 11614, 1161407 (2021) https://doi.org/10.1117/12.2585319

Proceedings Article | 20 March 2019 Presentation + Paper
Yacoub Kureh, Vito Dai, Luigi Capodieci
Proceedings Volume 10962, 1096207 (2019) https://doi.org/10.1117/12.2516583
KEYWORDS: Clouds, Manufacturing, Mirrors, Visualization, Computer aided design, Data analysis, Distance measurement, Design for manufacturability, Integrated circuits, Shape analysis

Proceedings Article | 3 April 2017 Presentation + Paper
Vito Dai, Edward Kah Ching Teoh, Ji Xu, Bharath Rangarajan
Proceedings Volume 10148, 1014808 (2017) https://doi.org/10.1117/12.2262146
KEYWORDS: Pattern recognition, Yield improvement, Computational lithography, Databases, Manufacturing, Integrated circuit design, Machine learning, Analytics, Integrated circuits, Design for manufacturability, Optical proximity correction, Product engineering, Lithography, Statistical analysis, Metrology, Computer simulations

Proceedings Article | 26 March 2015 Paper
Proceedings Volume 9427, 94270Q (2015) https://doi.org/10.1117/12.2086904
KEYWORDS: Manufacturing, Metals, Design for manufacturing, Raster graphics, Image classification, Data modeling, Statistical analysis, Design for manufacturability, Current controlled current source, Optimization (mathematics)

Proceedings Article | 18 March 2015 Paper
Lynn Wang, Sriram Madhavan, Vito Dai, Luigi Capodieci
Proceedings Volume 9427, 942704 (2015) https://doi.org/10.1117/12.2085955
KEYWORDS: Image classification, Manufacturing, Lithography, Double patterning technology, Bismuth, Library classification systems, Metals, Photomasks, Overlay metrology, Design for manufacturability

Showing 5 of 24 publications
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