Dr. Vivek G. Badami
Technology Fellow at Zygo Corporation
SPIE Involvement:
Author
Publications (4)

Proceedings Article | 9 September 2019 Presentation + Paper
Proc. SPIE. 11109, Advances in Metrology for X-Ray and EUV Optics VIII
KEYWORDS: Mirrors, X-ray optics, Metrology, Sensors, Interferometry, Power supplies, Deformable mirrors

Proceedings Article | 18 September 2018 Paper
Proc. SPIE. 10761, Adaptive X-Ray Optics V
KEYWORDS: X-ray optics, Metrology, Sensors, In situ metrology, Interferometry, Adaptive optics, Deformable mirrors, Fiber optics sensors, Position sensors, Synchrotron radiation imaging

Proceedings Article | 18 August 2005 Paper
Proc. SPIE. 5879, Recent Developments in Traceable Dimensional Measurements III
KEYWORDS: Mirrors, Clocks, Interferometers, Calibration, Error analysis, Interferometry, Optical testing, Collimators, Thermal effects, Temperature metrology

Proceedings Article | 1 July 2002 Paper
Proc. SPIE. 4688, Emerging Lithographic Technologies VI
KEYWORDS: Thermography, Refractive index, Fabry–Perot interferometers, Metrology, Statistical analysis, Interferometers, Error analysis, Optical coatings, Reflectivity, Temperature metrology

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