Dr. Vivek Kapila
at SUNY Poly SEMATECH
SPIE Involvement:
Author
Publications (8)

Proceedings Article | 1 April 2008 Paper
Proc. SPIE. 6921, Emerging Lithographic Technologies XII
KEYWORDS: Quartz, Glasses, Particles, Inspection, Atomic force microscopy, Photomasks, Extreme ultraviolet, Cavitation, Acoustics, Surface finishing

Proceedings Article | 16 November 2007 Paper
Proc. SPIE. 6730, Photomask Technology 2007
KEYWORDS: Quartz, Particles, Ions, Chemistry, Photomasks, Extreme ultraviolet lithography, Scanning probe microscopy, Vacuum ultraviolet, Mask cleaning, Liquids

Proceedings Article | 15 March 2007 Paper
Proc. SPIE. 6517, Emerging Lithographic Technologies XI
KEYWORDS: Gold, Iron, Quartz, Glasses, Particles, Inspection, Atomic force microscopy, Extreme ultraviolet, Aluminum, Surface finishing

Proceedings Article | 20 October 2006 Paper
Proc. SPIE. 6349, Photomask Technology 2006
KEYWORDS: Multilayers, Defect detection, Particles, Inspection, Atomic force microscopy, Scanning electron microscopy, Extreme ultraviolet, Deposition processes, Scanning probe microscopy, Defect inspection

Proceedings Article | 20 October 2006 Paper
Proc. SPIE. 6349, Photomask Technology 2006
KEYWORDS: Multilayers, Quartz, Particles, Silicon, Chemistry, Reflectivity, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography, Deposition processes

Showing 5 of 8 publications
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