Dr. Vivek K. Singh
Intel Fellow at Intel Corp
SPIE Involvement:
Conference Program Committee | Author
Publications (14)

Proceedings Article | 15 March 2012 Paper
Proc. SPIE. 8325, Advances in Resist Materials and Processing Technology XXIX
KEYWORDS: Lithography, Calibration, Polymers, Particles, Molecules, Photoresist materials, Line edge roughness, Photoresist processing, Photoresist developing, Polymer thin films

Proceedings Article | 3 April 2010 Paper
Proc. SPIE. 7641, Design for Manufacturability through Design-Process Integration IV
KEYWORDS: Lithography, Optical lithography, Cadmium, Metals, Glasses, Design for manufacturing, Photomasks, SRAF, Semiconducting wafers, Phase shifts

Proceedings Article | 7 March 2008 Paper
Proc. SPIE. 6924, Optical Microlithography XXI
KEYWORDS: Optical lithography, Imaging systems, Glasses, Near field, Projection systems, Image transmission, Photomasks, Mask making, Semiconducting wafers, Resolution enhancement technologies

Proceedings Article | 7 March 2008 Paper
Proc. SPIE. 6924, Optical Microlithography XXI
KEYWORDS: Optical lithography, Cadmium, Modulation, Etching, Glasses, Image transmission, Photomasks, SRAF, Semiconducting wafers, Phase shifts

Proceedings Article | 7 March 2008 Paper
Proc. SPIE. 6924, Optical Microlithography XXI
KEYWORDS: Lithography, Optical lithography, Glasses, Manufacturing, Image quality, Photomasks, Computational lithography, Optical proximity correction, Optimization (mathematics), Semiconducting wafers

Showing 5 of 14 publications
Proceedings Volume Editor (4)

Conference Committee Involvement (21)
DTCO and Computational Patterning
27 February 2022 | San Jose, California, United States
Design-Technology Co-optimization XV
22 February 2021 | Online Only, California, United States
Design-Process-Technology Co-optimization for Manufacturability XIV
26 February 2020 | San Jose, California, United States
Design-Process-Technology Co-optimization for Manufacturability XIII
27 February 2019 | San Jose, California, United States
Design-Process-Technology Co-optimization for Manufacturability XII
28 February 2018 | San Jose, California, United States
Showing 5 of 21 Conference Committees
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