Vivekananda P. Adiga
Research Assistant/Grad Student at Univ of Pennsylvania
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 12 May 2009
Proc. SPIE. 7318, Micro- and Nanotechnology Sensors, Systems, and Applications
KEYWORDS: Microelectromechanical systems, Carbon, Diamond, Resonators, Chemical species, Crystals, Silicon, Silicon films, Semiconducting wafers, Temperature metrology

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