Dr. Vivian Peng-We Chuang
Senior Engineer at Dow Electronic Materials/Rohm & Haas
SPIE Involvement:
Author
Publications (3)

PROCEEDINGS ARTICLE | March 20, 2015
Proc. SPIE. 9425, Advances in Patterning Materials and Processes XXXII
KEYWORDS: Etching, Dry etching, Polymers, Metals, Silicon, Reflectivity, Chemical vapor deposition, Oxygen, Photoresist materials, Photomasks

PROCEEDINGS ARTICLE | March 21, 2012
Proc. SPIE. 8323, Alternative Lithographic Technologies IV
KEYWORDS: Thin films, Optical lithography, Etching, Annealing, Silicon, Materials processing, Scanning electron microscopy, Directed self assembly, Transistors, Reactive ion etching

PROCEEDINGS ARTICLE | March 30, 2010
Proc. SPIE. 7637, Alternative Lithographic Technologies II
KEYWORDS: Lithography, Optical spheres, Etching, Polymers, Metals, Annealing, Oxygen, Picosecond phenomena, Nanolithography, Plasma

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