Dr. Vivian Peng-We Chuang
at JSR Micro Inc
SPIE Involvement:
Publications (3)

Proceedings Article | 20 March 2015 Paper
Shintaro Yamada, Deyan Wang, Vivian Chuang, Cong Liu, Sabrina Wong, Michael Clark, Charlotte Cutler, William Williams, Paul Baranowski, Mingqi Li, Joe Mattia, JoAnne Leonard, Peter Trefonas, Kathleen O’Connell, Cheng bai Xu
Proceedings Volume 9425, 94251X (2015) https://doi.org/10.1117/12.2086005
KEYWORDS: Metals, Etching, Reflectivity, Dry etching, Photoresist materials, Polymers, Chemical vapor deposition, Oxygen, Photomasks, Silicon

Proceedings Article | 21 March 2012 Paper
Shih-Wei Chang, Erin Vogel, Valeriy Ginzburg, Daniel Murray, John Kramer, Jeffrey Weinhold, Vivian P. Chuang, Rahul Sharma, Jessica Evans, Brian Landes, Shouren Ge, Peter Trefonas, Phillip Hustad
Proceedings Volume 8323, 83231M (2012) https://doi.org/10.1117/12.916429
KEYWORDS: Annealing, Etching, Thin films, Scanning electron microscopy, Optical lithography, Materials processing, Reactive ion etching, Directed self assembly, Transistors, Silicon

Proceedings Article | 30 March 2010 Paper
C. Ross, Y. Jung, V. Chuang, J. Son, K. Gotrik, R. Mickiewicz, J. K. Yang, J. Chang, K. Berggren, J. Gwyther, I. Manners
Proceedings Volume 7637, 76370H (2010) https://doi.org/10.1117/12.848502
KEYWORDS: Optical spheres, Lithography, Etching, Nanolithography, Metals, Polymers, Oxygen, Plasma, Picosecond phenomena, Annealing

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