Dr. Vivian Peng-We Chuang
at JSR Micro Inc
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 20 March 2015 Paper
Proc. SPIE. 9425, Advances in Patterning Materials and Processes XXXII
KEYWORDS: Etching, Dry etching, Polymers, Metals, Silicon, Reflectivity, Chemical vapor deposition, Oxygen, Photoresist materials, Photomasks

Proceedings Article | 21 March 2012 Paper
Proc. SPIE. 8323, Alternative Lithographic Technologies IV
KEYWORDS: Thin films, Optical lithography, Etching, Annealing, Silicon, Materials processing, Scanning electron microscopy, Directed self assembly, Transistors, Reactive ion etching

Proceedings Article | 30 March 2010 Paper
Proc. SPIE. 7637, Alternative Lithographic Technologies II
KEYWORDS: Lithography, Optical spheres, Etching, Polymers, Metals, Annealing, Oxygen, Picosecond phenomena, Nanolithography, Plasma

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