Dr. Viviana Agudelo
Researcher at Combustion Ingenieros SAS
SPIE Involvement:
Author
Area of Expertise:
Optics , Lithography , Computational Optics , Optoelectronics , Diffractive optics , Holography
Publications (6)

PROCEEDINGS ARTICLE | March 15, 2016
Proc. SPIE. 9780, Optical Microlithography XXIX
KEYWORDS: Lithography, Holograms, Holography, Optical lithography, Diffractive optical elements, Digital holography, Imaging systems, Scanning electron microscopy, Photoresist materials, Spatial light modulators, Maskless lithography, Optical design software, Optics manufacturing, Electro optical design, Information security, Design for manufacturability

SPIE Journal Paper | December 2, 2013
JM3 Vol. 13 Issue 01
KEYWORDS: Photomasks, Diffraction, Artificial neural networks, Data modeling, Optical lithography, Systems modeling, Lithography, Polarization, Neurons, Optical simulations

PROCEEDINGS ARTICLE | April 12, 2013
Proc. SPIE. 8683, Optical Microlithography XXVI
KEYWORDS: Lithography, Diffraction, Optical lithography, Data modeling, Imaging systems, Artificial neural networks, Photomasks, Optical simulations, Performance modeling, Systems modeling

PROCEEDINGS ARTICLE | March 13, 2012
Proc. SPIE. 8326, Optical Microlithography XXV
KEYWORDS: Lithography, Diffraction, Optical filters, Polarization, Calibration, 3D modeling, Solids, Projection systems, Photomasks, Immersion lithography

PROCEEDINGS ARTICLE | May 27, 2011
Proc. SPIE. 8082, Optical Measurement Systems for Industrial Inspection VII
KEYWORDS: Signal to noise ratio, Diffraction, Optical filters, Holograms, Digital holography, Spatial filters, Digital filtering, Fourier transforms, Optical simulations, Reconstruction algorithms

PROCEEDINGS ARTICLE | March 23, 2011
Proc. SPIE. 7973, Optical Microlithography XXIV
KEYWORDS: Lithography, Diffraction, Lithographic illumination, Polarization, 3D modeling, Projection systems, Photomasks, Performance modeling, Projection lithography, Systems modeling

Showing 5 of 6 publications
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