Prof. Vladimir V. Andreev
at Bauman Moscow State Technical Univ
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | December 30, 2016
Proc. SPIE. 10224, International Conference on Micro- and Nano-Electronics 2016
KEYWORDS: Semiconductors, Thin films, Switching, Dielectrics, Electrons, Silicon, Silicon films, Capacitance, Phosphorus, Physical research

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