Dr. Vladimir Bachurin
at Yaroslavl branch of FTI RAS
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 15 March 2019 Paper
Proc. SPIE. 11022, International Conference on Micro- and Nano-Electronics 2018
KEYWORDS: Ions, Tantalum, Iron, Ruthenium, Chemical elements, Multilayers, Cobalt, Thin films, Chemical analysis, Manganese

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