Prof. Vladimir Mikhailovich Borisov
Head of Lab.
SPIE Involvement:
Author
Publications (14)

Proceedings Article | 12 April 2007
Proc. SPIE. 6611, Laser Optics 2006: High-Power Gas Lasers
KEYWORDS: Lithography, Electrodes, Ions, Manufacturing, Xenon, Extreme ultraviolet, Extreme ultraviolet lithography, Plasma, Liquids, Tin

Proceedings Article | 15 March 2007
Proc. SPIE. 6517, Emerging Lithographic Technologies XI
KEYWORDS: Electrodes, Manufacturing, Laser applications, Xenon, Extreme ultraviolet, Integrated optics, Extreme ultraviolet lithography, Prototyping, Plasma, Tin

Proceedings Article | 23 March 2006
Proc. SPIE. 6151, Emerging Lithographic Technologies X
KEYWORDS: Electrodes, Hydrogen, Manufacturing, Xenon, Extreme ultraviolet, Extreme ultraviolet lithography, High volume manufacturing, Prototyping, Plasma, Tin

Proceedings Article | 29 July 2004
Proc. SPIE. 5486, ALT'03 International Conference on Advanced Laser Technologies: Biomedical Optics
KEYWORDS: Lasers, Electrodes, Ultraviolet radiation, Laser applications, Laser development, Carbon dioxide lasers, Gas lasers, Laser dentistry, Pulsed laser operation, Absorption

Proceedings Article | 16 June 2004
Proc. SPIE. 5479, Laser Optics 2003: High-Power Gas Lasers
KEYWORDS: Lithography, Mirrors, Ultraviolet radiation, High power lasers, Xenon, Gas lasers, Extreme ultraviolet, Excimer lasers, Pulsed laser operation, Plasma

Showing 5 of 14 publications
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