Vladimir A. Petukhov
at National Research Univ of Electronic Technology
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | December 30, 2016
Proc. SPIE. 10224, International Conference on Micro- and Nano-Electronics 2016
KEYWORDS: Oxides, Thin films, Etching, Electrodes, Metals, Silicon, Numerical simulations, Heat flux, Thermoelectric materials, Scanning tunneling microscopy

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