Dr. Vladimir N. Polkovnikov
at Institute for Physics of Microstructures RAS
SPIE Involvement:
Author
Publications (5)

SPIE Journal Paper | February 5, 2018
JATIS Vol. 4 Issue 01
KEYWORDS: Collimators, Mirrors, Telescopes, Spherical lenses, Cameras, Vacuum ultraviolet, Ultraviolet radiation, Ultraviolet telescopes, Monochromatic aberrations, Optical instrument design

PROCEEDINGS ARTICLE | May 31, 2017
Proc. SPIE. 10235, EUV and X-ray Optics: Synergy between Laboratory and Space V
KEYWORDS: Mirrors, Polishing, Reflection, Etching, X-rays, Ions, Silicon, Reflectivity, Surface roughness, Ion beams, Extreme ultraviolet, Neon, Beryllium

PROCEEDINGS ARTICLE | May 31, 2017
Proc. SPIE. 10235, EUV and X-ray Optics: Synergy between Laboratory and Space V
KEYWORDS: Thin films, Optical filters, Mirrors, Multilayers, Sensors, Calibration, Photons, X-rays, Reflectometry, Objectives, Extreme ultraviolet, Charge-coupled devices, Monochromators, EUV optics, Plasma

PROCEEDINGS ARTICLE | May 31, 2017
Proc. SPIE. 10235, EUV and X-ray Optics: Synergy between Laboratory and Space V
KEYWORDS: Telescopes, Mirrors, X-ray optics, Sun, Interferometers, Interferometry, Optical testing, Space telescopes, Bridges, Extreme ultraviolet, Epoxies, Missiles, Astronomical imaging, Adhesives, Ultraviolet telescopes, EUV optics, Temperature metrology

PROCEEDINGS ARTICLE | December 30, 2016
Proc. SPIE. 10224, International Conference on Micro- and Nano-Electronics 2016
KEYWORDS: Microelectromechanical systems, Lithography, Mirrors, Multilayers, Reflection, X-rays, Reflectivity, Micromirrors, Extreme ultraviolet lithography, Semiconducting wafers

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