Dr. Vladimir I. Svetsov
at Ivanovo State Univ of Chemistry and Technology
SPIE Involvement:
Author
Publications (4)

Proceedings Article | 8 January 2013 Paper
A. Efremov, A. Yudina, A. Davlyatshina, D. Murin, V. Svetsov
Proceedings Volume 8700, 870003 (2013) https://doi.org/10.1117/12.2017138
KEYWORDS: Protactinium, Plasma, Chlorine, Oxygen, Argon, Ions, Diffusion, Ionization, Chemical species, Gases

Proceedings Article | 10 June 2006 Paper
Proceedings Volume 6260, 626009 (2006) https://doi.org/10.1117/12.677019
KEYWORDS: Chlorine, Plasma, Particles, Chemical species, Molecules, Protactinium, Ions, Human-computer interaction, Ionization, Diffusion

Proceedings Article | 28 May 2004 Paper
Proceedings Volume 5401, (2004) https://doi.org/10.1117/12.557001
KEYWORDS: Plasma, Chlorine, Argon, Ions, Particles, Ionization, Chemical species, Molecules, Autoregressive models, Chemistry

Proceedings Article | 28 May 2004 Paper
Proceedings Volume 5401, (2004) https://doi.org/10.1117/12.557250
KEYWORDS: Etching, Plasma, Argon, Gold, Chlorine, Ions, Thin films, Chemical species, Autoregressive models, Sputter deposition

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