Dr. Vladimir I. Vaganov
Chairman & CEO at
SPIE Involvement:
Author
Publications (4)

PROCEEDINGS ARTICLE | April 24, 2003
Proc. SPIE. 5116, Smart Sensors, Actuators, and MEMS
KEYWORDS: Microelectromechanical systems, Wafer-level optics, Signal attenuation, Reliability, Resistance, Optical fabrication, Variable optical attenuators, Semiconducting wafers, Optics manufacturing, Wafer bonding

PROCEEDINGS ARTICLE | April 24, 2003
Proc. SPIE. 5116, Smart Sensors, Actuators, and MEMS
KEYWORDS: Microelectromechanical systems, Packaging, Semiconductors, Electronics, Manufacturing, Optical testing, Photonics, Integrated optics, Semiconducting wafers, Optics manufacturing

PROCEEDINGS ARTICLE | April 24, 2003
Proc. SPIE. 5116, Smart Sensors, Actuators, and MEMS
KEYWORDS: Microelectromechanical systems, Optical lithography, Polymers, Metals, Glasses, Silicon, Bridges, Semiconducting wafers, Anisotropic etching, Wafer bonding

PROCEEDINGS ARTICLE | August 23, 2002
Proc. SPIE. 4906, Optical Components and Transmission Systems
KEYWORDS: Microelectromechanical systems, Packaging, Semiconductors, Electronics, Manufacturing, Optical testing, Photonics, Integrated optics, Semiconducting wafers, Optics manufacturing

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