Vladimir Verstov
at Bauman Moscow State Technical Univ
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | December 18, 2014
Proc. SPIE. 9440, International Conference on Micro- and Nano-Electronics 2014
KEYWORDS: Lithography, Optical lithography, Metals, Silicon, Computing systems, Computer programming, Very large scale integration, Photomasks, Transistors, Double patterning technology

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