Vladimir Zabrodsky
Guru at Ioffe Institute
SPIE Involvement:
Author
Area of Expertise:
silicon photodiodes , VUV , metrology
Websites:
Publications (1)

PROCEEDINGS ARTICLE | May 3, 2013
Proc. SPIE. 8777, Damage to VUV, EUV, and X-ray Optics IV; and EUV and X-ray Optics: Synergy between Laboratory and Space III
KEYWORDS: Optical filters, Mirrors, Silica, Visualization, Sensors, X-rays, Silicon, Photodiodes, Extreme ultraviolet, Extreme ultraviolet lithography

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