Dr. Vladislav Zhigalov
at MIET
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 30 December 2016
Proc. SPIE. 10224, International Conference on Micro- and Nano-Electronics 2016
KEYWORDS: Carbon, Nanostructures, Capacitors, Graphene, Electrodes, Atomic force microscopy, Scanning electron microscopy, Aluminum, Palladium, Carbon nanotubes

Proceedings Article | 18 December 2014
Proc. SPIE. 9440, International Conference on Micro- and Nano-Electronics 2014
KEYWORDS: Polishing, Nanostructuring, Etching, Molecules, Silicon, Scanning electron microscopy, Atmospheric physics, Humidity, Semiconducting wafers, Chemisorption

Proceedings Article | 18 December 2014
Proc. SPIE. 9440, International Conference on Micro- and Nano-Electronics 2014
KEYWORDS: Carbon dioxide, Argon, Molecules, Silicon, Gases, Oxygen, Nanoelectronics, Single walled carbon nanotubes, Atmospheric modeling, Carbon nanotubes

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