Mr. Volker Schmidt
Chief Technical Officer at Berliner Glas KGaA Herbert Kubatz GmbH
SPIE Involvement:
Author
Publications (4)

PROCEEDINGS ARTICLE | April 17, 2014
Proc. SPIE. 9048, Extreme Ultraviolet (EUV) Lithography V
KEYWORDS: Lithography, Interferometers, Glasses, Particles, Manufacturing, Distortion, 3D modeling, 3D metrology, Thermal effects, Semiconducting wafers

PROCEEDINGS ARTICLE | March 23, 2010
Proc. SPIE. 7636, Extreme Ultraviolet (EUV) Lithography
KEYWORDS: Semiconductors, Lithography, Reticles, Interferometers, Calibration, Electrodes, Glasses, Dielectrics, Silicon, Semiconducting wafers

PROCEEDINGS ARTICLE | April 12, 2005
Proc. SPIE. 5708, Laser Resonators and Beam Control VIII
KEYWORDS: Mirrors, Polishing, Silica, Manufacturing, Laser applications, Space mirrors, Lightweight mirrors, Adhesives, Optics manufacturing, Surface finishing

PROCEEDINGS ARTICLE | January 15, 2003
Proc. SPIE. 4979, Micromachining and Microfabrication Process Technology VIII
KEYWORDS: Semiconductors, Polymethylmethacrylate, Etching, Glasses, Ion beams, Photomasks, Wet etching, Reactive ion etching, Semiconducting wafers, Surface finishing

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