Dr. Volodymyr Ivanovych Ivashchenko
at Institute for Problems of Materials Science
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 10 September 2008
Proc. SPIE. 7041, Nanostructured Thin Films
KEYWORDS: Nanostructures, Chemical species, Annealing, Crystals, Silicon, Oxygen, Plasma enhanced chemical vapor deposition, Silicon carbide, Temperature metrology, Absorption

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