Dr. Vsevolod A. Kolpakov
at
SPIE Involvement:
Author
Publications (3)

PROCEEDINGS ARTICLE | April 29, 2008
Proc. SPIE. 7025, Micro- and Nanoelectronics 2007
KEYWORDS: Thin films, Contamination, Silica, Chemical species, Metals, Molecules, Copper, Dielectrics, Interfaces, Natural surfaces

PROCEEDINGS ARTICLE | June 10, 2006
Proc. SPIE. 6260, Micro- and Nanoelectronics 2005
KEYWORDS: Cadmium, Etching, Particles, Molecules, Dielectrics, Electrons, Ions, Oxygen, Natural surfaces, Plasma

PROCEEDINGS ARTICLE | May 28, 2004
Proc. SPIE. 5401, Micro- and Nanoelectronics 2003
KEYWORDS: Diamond, Silica, Databases, Etching, Ions, Silicon, Software development, Plasma etching, Silicon carbide, Plasma

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