Dr. W. Robert Ashurst
Assistant Professor at Auburn Univ
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | January 22, 2005
Proc. SPIE. 5716, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS IV
KEYWORDS: Microelectromechanical systems, Polymers, Glasses, Silicon, Manufacturing, Reliability, Optical coatings, Self-assembled monolayers, Plastic coatings, Liquids

PROCEEDINGS ARTICLE | December 30, 2003
Proc. SPIE. 5342, Micromachining and Microfabrication Process Technology IX
KEYWORDS: Microelectromechanical systems, Coating, Reliability, Process control, Deposition processes, Semiconducting wafers, Self-assembled monolayers, Plasma treatment, Plasma, Liquids

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